Diffraction pattern

X-Ray Diffraction

Metrology

X-ray diffraction

X-ray Diffraction is used to identify the crystal planes in the silicon ingot and to check the precise orientation of the crystals during production.

The Bede 200 system has been specifically adapted to allow precise measurement of crystal rocking curves. Using monochromatic CuKα radiation, rocking curves can be measured to 0.5 arcsec resolution (interpolated to 0.1 arcsec).

Crystal Scientific specify that the rocking curve widths for finished crystals will be within 0.2 arcsec of the theoretical FWHM.

Examples of Crystal Rocking Curves

rocking curve

Si(220) Rocking Curve from Si channel cut
crystal at CuKα 9.5 arc secs

rocking curve

Si(311) Rocking Curve from Si channel cut
crystal at CuKα 2.8 arc secs